Infrared Microscope ❘ MCR – ViewohreEnglish

Infrared Microscope

Microscope Thermography

By the quality of the lens, alter the thermal image.

By choosing lens, convert the purpose.

Measurement in the microscale domain, microscope x ThermalViewX

Development background and consept

ThermalViewX MCR Series

In the world today, the development of advanced semiconductors is progressing, leading to a reduction in the size and miniaturization of structural patterns in all types of products and components. On the other hand, with the miniaturization and fine-tuning of semiconductor-related products, the issue of heat generation is increasing. Preventing abnormal overheating is essential for the lifetime and failure prevention of final products, but there are technical challenges in temperature measurement. While identifying and quantifying heat generation is important, it is difficult to capture local heat generation through simulations. Additionally, small objects cannot be measured with thermocouples, and when the dimensions of the heat generation site fall below 1 mm, specialized thermography is necessary for accurate measurement.

ThermalViewX MCR series is equipped with both hardware and software that provide the necessary functions, corrections, and calibration for measuring microscopic areas. It features detectors with sufficient sensitivity to capture small areas and optical systems with high resolution, as well as corrections and specialized calibration to address errors specific to microscopic areas. Additionally, it includes dedicated features on the GUI that allow users to make adjustments according to the situation. ThermalViewX MCR series is the latest microscope thermography system designed for advanced semiconductors and new products, including wafer patterns, material structures, tiny heat sources, light-emitting devices, small encapsulants, and micro-components and materials.

Points of the development

✓ Even in a 1mm² area indicating an average of 100°C, there may be areas where it reaches 400°C locally due to distribution.
✓ In the field of advanced semiconductor research, precise measurements with high accuracy, tailored to the area and as finely detailed as possible, are crucial.
✓ ThermalViewX MCR Series realize the high resolution, proprietary correction, and specialized calibration.
✓ Select the camera (pixels, speed, wave length) for your purpose and costs.
✓ Select the App software with essential and unique functions tailored for microscope purposes.
✓ Using easy-to-use ThermalViewX applications.
✓ Designing the app with scalability to accommodate future changes in usage.
✓ Achieving measurements that are not achievable with regular thermographis or cameras that have not undergone specialized calibration.

Features

✓ Achieves a resolution of less than 10 μm (from 8.7 μm to 7.9 μm) with non-cooled models.
✓ Achieves a resolution of 3 μm with cooled models.
✓ Performs unique correction and calibration for microscopy applications.
✓ Includes essential features as standard, such as video measurement, temperature value display on the GUI, zoom functionality, CSV output, and AVI output.
✓ Offers various extended functions, including video analysis, differential measurement, differential evaluation, and statistical analysis.
✓ Wide lineup. From cost-effective to high-end, high-resolution versions.
✓ Real-time Display, Easy operation with mouse click, Easy check of measured temperature with mouseover
✓ Does not miss small changes.
✓ Utilizes the integrated software "ThermalViewX Platform."
✓ The top-tier model can use CSV-simulated data and temperature values from other companies' cameras as reference data for differential measurements.

Measurement in the microscale domain, microscope thermography

Main feature of the MCR series

We offer a wide range of microscopic thermography that can acquire thermal images with micron-level resolution.It can measure temperatures in a range as narrow as less than 1 mm, which is impossible with ordinary thermography. Our unique calibration and correction functions enable detailed temperature measurement, and it is equipped with functions necessary for analysis, such as video or differential measurement. It is used in many fields related to MEMS and carbon neutrality, as well as in the semiconductor industry.

Installed specialized calibration and correction function for measurement in the microscale domain

Non-contact temperature measurement is affected by various types of noise when the measurement size reaches the micron level. ThermalViewX MCR series addresses each of these issues individually and realizes complex calibration. The software in the MCR series uses sophisticated calibration and occasional corrections automatically and appropriately, providing highly accurate temperature measurements.

Make applications extensible to measurement in the microscale domain from resolutions below 10μm to 100μm.

Lenses need to be exchanged according to resolution, and calibration and corrections corresponding to each lens are required. The software in the MCR series supports various resolutions and provides appropriate settings and functions. It is essential software for evaluating advanced semiconductors, materials, and manufacturing equipment, including narrower linewidths, smaller components, and thinner materials.。

With a single click, you can save a series of thermal images as one file. It is also possible to capture continuous still images for a specified number of frames. The time is recorded down to milliseconds for each frame, making it possible to identify exactly when each frame was taken afterward.

Specialized measurement function for organisms

On the application, you can view two images side by side in large size. You can display a real-time image while showing an analysis image next to it, allowing for simultaneous comparison and analysis, or easily presenting the comparison images to others. Both images can have their temperature bars adjusted independently on each screen, making comparison straightforward and reducing the time needed for operation.

See all equipped functions

See the MCR series camera model

Production Information

Features of the MCR series for each types

High resolution at a low price Ⅰ Cooling-based high-end

TYPE S ・ R ・ D ・ SC

ThermalViewX MCR series measures the temperature of advanced semiconductors that are becoming increasingly miniaturized. Due to their specialized nature, such systems are often limited in choice and expensive. However, the MCR series offers a range of options, from cost-effective high-resolution models to advanced cooled systems, allowing you to choose according to your needs and budget. We provide four types of software, ranging from the standard TYPE S to the TYPE SC with screening functions, each accompanied by a compatible camera.

High resolution at a low price

Thermal View MCR

TYPE S・R・D・SC

These are microscope thermography systems that achieve high sensitivity while maintaining a low cost. Typically, acquiring micron-level thermal images requires expensive infrared microscope systems. However, ThermalViewX MCR-XA0350 and XA0657 have achieved a balance between cost reduction and the sensitivity required for microscopy applications, making them suitable for focused applications such as temperature distribution measurement and use near room temperature.

Cooling-based high-end

thermalviewx_mcr64

TYPE S・R・D・SC

Using a cooled sensor allows for micron-level resolution measurements with sub-microsecond accuracy. You can select from resolutions starting at 3 micrometers, and the pixel count is 640×512, providing high spatial resolution. High-speed imaging up to 480 Hz is also possible.

Contact Us

Viewohre Imaging will select the best thermography camera for you from more than 100 options. Please feel free to contact us for more information.