ThermalViewX MCR Series
Microscope Thermography
to measure temperature at tiny areas of advanced semiconductors
Microscope Thermography "ThermalViewX MCR"
from standard models to high-end cooled type
ThermalViewX MCR series measures the temperature at tiny areas of advanced semiconductors that are getting increasingly smaller. Due to their unique characteristics, there are few choices and they are often expensive, but you can choose from affordable cost with high-resolution models to high-end cooled models depending on your needs and budget. We have three types of software, from the standard TYPE S to TYPE D, which is equipped with a screening function, and we have cameras compatible with each type.
Standard
High sensitivity with affordable cost
Microscope thermography that has high sensitivity and low price. Acquiring thermal images at the micron level usually requires an expensive infrared microscope system.
High-end Cooled camera
High speed・High sensitivity・High resolution
By using a cooled FPA, it’s now available to measure micron-level resolution in sub-mili seconds. You can choose from a resolution of 3 micrometers, and the number of pixels is 640×512, which provides high spatial resolution. High-speed shooting of MAX480Hz is possible.
| Model | Pixels | Resolution | Temp | Distance | (Range) |
|---|---|---|---|---|---|
| XMCR32-XA0351-06x | 320x256 | 28.4 | ～100 | 48.4mm | 9.1mm x 7.3mm |
| XMCR32-XA0351-06xHT | 320x256 | 28.4 | ～400 | 48.4mm | 9.1mm x 7.3mm |
| XMCR32-XA0351-1x | 320x256 | 17 | ～100 | 22mm | 5.44mm x 4.35mm |
| XMCR32-XA0351-1xHT | 320x256 | 17 | ～400 | 22mm | 5.44mm x 4.35mm |
| XMCR32-XA0351-LWD1.25xHT | 320x256 | 13.6 | ～100 | 46mm | 4.35mm x 3.48mm |
| XMCR32-XA0351-3x | 320x256 | 8.7μm以下・画素ピッチ5.7 | ～100 | 11mm | 1.81mm x 1.45mm |
| XMCR32-XA0351-3xHT | 320x256 | 8.7μm以下・画素ピッチ5.7 | ～400 | 11mm | 1.81mm x 1.45mm |
| XMCR32-XA0351-2x | 320x256 | 10μm以下・画素ピッチ8.5 | ～100 | 11mm | 2.72mm x 2.18mm |
| XMCR32-XA0351-2xHT | 320x256 | 10μm以下・画素ピッチ8.5 | ～400 | 11mm | 2.72mm x 2.18mm |
| Model | Pixels | Resolution | Temp | Distance | (Range) |
|---|---|---|---|---|---|
| XMCR64-XA6150-25 | 640x512 | 25 | ～2000 | 172mm | 16mm x 12mm |
| XMCR64-XA6150-50 | 640x512 | 50 | ～2000 | 22mm | 32mm x 24mm |
| XMCR64-XA6150-100 | 640x512 | 100 | ～2000 | 22mm | 64mm x 48mm |
| XMCR64-XA67010-1x | 640x512 | 15 | ～320 | 11mm | 9.6mm x 7.68mm |
| XMCR64-XA67510-1x | 640x512 | 15 | ～320 | 11mm | 9.6mm x 7.68mm |
| XMCR64-XA67010-5x | 640x512 | 3 | ～320 | 11mm | 1.92mm x 1.536mm |
| XMCR64-XA67510-5x | 640x512 | 3 | ～320 | 11mm | 1.92mm x 1.536mm |
| XMCR64-XA0651-06x | 640x512 | 28.4 | ～100 | 22mm | 18.1mm x 14.5mm |
| XMCR64-XA0651-06xHT | 640x512 | 28.4 | ～400 | 22mm | 18.1mm x 14.5mm |
| XMCR64-XA0651-1x | 640x512 | 17 | ～100 | 11mm | 10.9mm x 8.7mm |
| XMCR64-XA0651-1xHT | 640x512 | 17 | ～400 | 11mm | 10.9mm x 8.7mm |
| XMCR64-XA0651-3xV2 | 640x512 | 8.7μm以下・画素ピッチ5.7 | ～100 | 11mm | 3.63mm x 2.91mm |
| XMCR64-XA0651-3xV2HT | 640x512 | 8.7μm以下・画素ピッチ5.7 | ～400 | 11mm | 3.63mm x 2.91mm |
| XMCR64-XA0651-1.25xHT | 640x512 | 13.6 | ～550 | 42mm | 8.71mm x 6.96mm |
| XMCR64-XA0651-03x | 640x512 | 56.7 | ～100 | 229mm | 36.3mm x 29mm |
| XMCR64-XA0651-03xHT | 640x512 | 56.7 | ～400 | 229mm | 36.3mm x 29mm |
| XMCR64-XA0651-2x | 640x512 | 10μm以下・画素ピッチ8.5 | ～100 | 11mm | 5.44 x 4.35mm |
| XMCR64-XA0651-2xHT | 640x512 | 10μm以下・画素ピッチ8.5 | ～400 | 11mm | 5.44 x 4.35mm |
Details by Software Type
TYPE S
MCR Series TYPE S
Standard Software
Standard software for microscope thermography. You can utilize the calibration data and various original corrections required for micro area measurement. Equipped with basic functions such as video measurement, CSV output overtime, still images, one CSV, and bitmap.
Lineup
Pixels 640×512
TYPE S Characteristics
Special calibration and correction for micron level size area measurement
Measuring temperatures in areas as small as 5 mm square in the imaging range can only be done with microscope thermography. thermo-couples, a standard contact type thermometer, is larger than the size of an object to be measured, and a non-contact radiation thermometer cannot accurately aim at the object to be measured. ThermalViewX MCR Type S has all the basic functions required for microscope thermography. It has been used for many years in various situations such as research support, heat generation identification, failure analysis, etc.
The best resolution
Temperature measurement in tiny areas requires spatial resolution. The combination of image FPA, lens, calibration, and correction technology are provided by the ThermalViewX MCR series with the highest performance and high resolution. A variety of lenses can be selected from resolutions below 10μm, and calibration can be selected.
User 1point calibration
Thermography is usually susceptible to the effects of the atmosphere drift, and as a result, the measured values may fluctuate. By adjusting the offset function to a separate reference temperature, temperature accuracy and temperature reproducibility can be improved. Since it is corrected for each sensitivity, it is possible to apply an offset to the entire range rather than simply adding or subtracting.
Real time Measurement
With comparable two displays, you can display live thermal images on the left and saved thermal images on the right. It is possible to take a set number of still images continuously. You can take pictures of the temperature during operation like in a video, or select the best shot by taking several pictures at once.
TYPE R
MCR Series TYPE R
Measuring Temperature for Advanced Semiconductor/Micro Electronics & Parts
Software that provides measurement of temperature in micron-level size areas and is excellent for temperature analysis for advanced semiconductors and micron meter size materials with, for example, video analysis, temporal CSV output, pattern change extraction, etc. In addition to Type S, Type R enable you to use excellent functions for searching maximum and minimum temperature frames in video files, pattern change detection, and use of video thumbnails. Memorizing file name list is convenient.
TYPE R Characteristics
Application software to enhance video analysis for research and development of your products
Embedded with excellent functions for video analysis
Analysing thermal imaging movie for micron meter sq areas has been becoming important for recent devices and parts in many situations, such as heat generation issues and energy efficiency improvements associated with miniaturization of products and parts, light sources for semiconductor manufacturing, and new material development. Embedded with various movie functions such as frame search by highest/coldest temperature, movie playback, movie thumbnails, and continuous image CSV output. A new application that supports new correction processing and also supports the highest level of real resolution of non-cooled type, 8.7 to 7.81μm.
Movie search with new movie control panel
You can search for the corresponding frame in the movie data with information of the maximum/minimum temperature. You can also search by time and temperature, such as the next frame every 1 second or every 1℃ increase.
Easy to use with Many functionalities
Video playback function, stop, one button return to 0 frame. You can easily grasp the entire video with the frame skip function.
Easy Data Access
You can check the images of 20 frames of one video in a list. You can grasp everything from the next frame image to the entire image of thousands of images at once.
TYPE D
MCR Series TYPE D
Differential Images for Microscope Thermography
This software is capable of outputting differential thermal images in addition to the functions of Type S and Type R. Changes such as inter-frame differences, reference differences, and differential differences are visualized as feature patterns. CSV data such as cameras other than ThermalViewX and simulation data can be input as reference data. In addition to evaluation based on temperature values, visualization of temperature differences allows failure analysis and confirmation/comparison of temperature changes. Furthermore, you can input CSV data such as cameras other than ThermalViewX and simulation data.
TYPE D Characteristics
Real-time Differential Imaging for micron-level size areas
The difference between the previous thermal image and the present thermal image can be displayed in real time while the image is being acquired. Since it sequentially subtracts temporally adjacent thermal images, it is suitable for capturing instantaneous changes.
More Differential Imaging for micron-level size areas
The difference between the thermal image set in advance and the thermal image acquired in real time can be displayed during camera image acquisition. Since the difference is made against a pre-set reference image, you can see the total change from the time the reference was set. There are ways to use it, such as estimating the total change in heat amount and total energy consumption, and canceling the temperature offset when setting the standard.
Available with CSV Data captured by other vendors as criteria image
We don’t normally give users to display thermal images from CSV Data by, for example, other vendors. The reason why we open everything from raw data is from the standpoint of evidence, and because CSV data can be modified. With Type D, along with customer’s request to compare their data with, data that remains only CSVs in the past , using as reference data for differences can be displayed on the ThermalViewX App and used as subtracted data.
Output Consecutive CSV Data with differential imaging overtime.
ThermalViewX can continuously output all pixel temperature data of a thermal image as CSV. Each piece of data will be output to a separate CSV. This is used when you want temperature data for all pixels over time in CSV format, or when you want to use analysis software separately.
TYPE SC
MCR Series TYPE SC
Monitoring system for inspection
A dedicated thermography for screening equipped with ThermalViewX MCR series technology and with improved usability for inspectors. Based on the fine area measurement technology of the MCR series, it is equipped with unique color processing and signal drift control that make it easier to identify abnormal heat generation, and reduces the burden on the inspector with alert displays, warnings, and isotherms.
TYPE SC Characteristics
Imaging Technologies for clear thermal image
ThermalViewX uses a color tone curve to respond to the range you want to distinguish. It reacts near the threshold and displays it visually for the examiner to understand. It is also possible to extract characteristic colors using isotherms.
Variety of variables for screening
For making a judgment as a primary screening, it is necessary to determine the criteria. Simply marking the moment a certain temperature is detected as a positive result in excessive detection (false positives) or oversights (false negatives). For this reason, Thermal View
Special Calibration
Non-contact temperature measurement is affected by a lot of unusual noise when the measurement size reaches the micron level. Simply determining whether the temperature is high will reduce the accuracy of classifying whether it is abnormal or not. The MCR Series software appropriately and automatically utilizes complex calibrations and occasional corrections to provide highly accurate temperature measurements.
Various way to alarm for abnormal temperature
Type SC allows you to choose from a variety of ways to issue alerts. This includes emitting a warning sound from the PC speaker, changing the screen color, and color-coding using isotherm. It is also possible to semi-automate the process to reduce the burden on the examiner, and to change the warning sound to a music file prepared by the examiner to reduce discomfort for the subject.